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Ben Tsai

Chief Technology Officer and Executive Vice President of Corporate Alliances at KLA Tencor


Ben Tsai, Ph.D., is the chief technology officer (CTO) and executive vice president of corporate alliances at KLA-Tencor. He is responsible for spearheading KLA-Tencor’s technology roadmap, strategic technology sourcing, corporate alliances and venture investments. Tsai has spent more than 20 years at KLA-Tencor in various technology and business leadership positions. During his tenure at the company he has served as vice president and general manager of the WIN division and in 1994was appointed to CTO when the company was operating as KLA Instruments.

He was previously senior vice president of technology at Tokyo Electron Limited. Tsai has held advisory roles with Ultratech, Inc., and Varian Semiconductor Associates, where he served on each company’s board of directors. Additionally, he holds approximately 50 patents in the areas of inspection and metrology. Tsai received his bachelor’s degree in electrical engineering from the National Taiwan University, and his master’s degree and doctorate in electrical engineering from the University of Illinois at Urbana-Champaign.